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BROADBAND MICROSTRIP TO COPLANAR WAVEGUIDE TRANSITION BY ANISOTROPIC ETCHING OF GALLIUM ARSENIDE
BROADBAND MICROSTRIP TO COPLANAR WAVEGUIDE TRANSITION BY ANISOTROPIC ETCHING OF GALLIUM ARSENIDE
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机译:砷化镓各向异性刻蚀使宽带宽带微带向共面波导过渡
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摘要
A broadband interconnection between a microstrip and a coplanar waveguide is provided without use of via holes by using anisotropic etching to form a sloped surface between connection points. The sloped surface is then metallized to provide the interconnection.
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