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Controlled method of manufacture of multiple-notch rugate filters

机译:多级皱褶过滤器的受控制造方法

摘要

An error-compensated process for forming a multiple-notch optical filter which is characterized by a continually and accurately varying periodic profile. The optical medium if formed on a substrate so that the profile of the refractive index is multiply sinusoidally modulated to maintain Bragg's law for each component in the multiple- notch profile. In a preferred embodiment, as the optical medium is coated on the substrate, the depositing film is monitored by optical techniques, and feedback information is provided to a computer driven by a pre- programmed process control algorithm so that real time control of the manufacturing process may be accomplished.
机译:一种用于形成多级光学滤波器的误差补偿过程,其特征在于连续且精确地改变周期性轮廓。如果将光学介质形成在基板上,以使折射率分布被正弦波调制,以保持多凹口轮廓中每个分量的布拉格定律。在一个优选的实施方案中,当将光学介质涂覆在基底上时,通过光学技术监控沉积膜,并将反馈信息提供给由预编程的过程控制算法驱动的计算机,从而对制造过程进行实时控制。可能会完成。

著录项

  • 公开/公告号SG103894G

    专利类型

  • 公开/公告日1994-10-28

    原文格式PDF

  • 申请/专利权人 HUGHES AIRCRAFT COMPANY;

    申请/专利号SG19940001038

  • 发明设计人 HALL JAMES T;

    申请日1994-07-27

  • 分类号C23C16/52;C23C14/54;G01N21/84;G02B5/26;G02B1/10;

  • 国家 SG

  • 入库时间 2022-08-22 04:44:23

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