FERROELECTRIC MATERIAL BASED MICROSENSOR ARRAY AND PROCESS FOR THE PRODUCTION THEREOF

摘要

Ferroelectric material based microsensor array deposited on a membrane made from a mixed oxide consisting of silicon and lead. Since the membrane is amorphous, it can withstand to greater deformation than crystalline membranes of the prior art. The process has the advantage of providing closed membranes and does not require an access path for chemical reactives. Application in acoustic or thermal imagers.