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Solid state imaging device having high-sensitivity and low-noise characteristics by reducing electrostatic capacity of interconnection

机译:通过降低互连的静电容量而具有高灵敏度和低噪声特性的固态成像装置

摘要

There is provided a solid state imaging device having high-sensitivity, low-noise characteristics by reducing electrostatic capacity relating to interconnection. The solid state imaging device includes a photoelectric conversion section (21), a transfer section (22), a floating diffusion layer (51) for receiving signal charges from the transfer section (22), and an output transistor (T1) having a gate electrode (18) connected to the floating diffusion layer (51) via an interconnection. A source (19a) and a drain (19b) of the output transistor (T1) are provided commonly within a flat p-type well (13) of relatively thin concentration in which the photoelectric conversion section (21), the transfer section (22), and the floating diffusion layer (51) are also provided. It becomes possible to reduce an interconnection capacity, a gate-drain capacity, and a gate-channel capacity, to increase gain of a source follower circuit, to relax electric fields in the vicinity of the drain (19b), and to prevent electric charges from inflow and outflow from substrate (11), without any increase in the fabrication process. As a result, a high-sensitivity, low-noise solid state imaging device can be offered.
机译:通过减少与互连有关的静电容量,提供了一种具有高灵敏度,低噪声特性的固态成像装置。固态成像装置包括光电转换部分(21),转移部分(22),用于从转移部分(22)接收信号电荷的浮置扩散层(51)以及具有栅极的输出晶体管(T1)。电极(18)通过互连连接到浮动扩散层(51)。输出晶体管(T1)的源极(19a)和漏极(19b)通常设置在浓度较薄的平坦的p型阱(13)内,在该p型阱中,光电转换部(21),转移部(22) ),并且还设置了浮动扩散层(51)。减小互连容量,栅极-漏极容量和栅极-沟道容量,增加源极跟随器电路的增益,缓和漏极(19b)附近的电场并防止电荷成为可能。不受衬底(11)流入和流出的影响,而无需增加制造过程。结果,可以提供高灵敏度,低噪声的固态成像装置。

著录项

  • 公开/公告号EP0605958A1

    专利类型

  • 公开/公告日1994-07-13

    原文格式PDF

  • 申请/专利权人 SHARP KABUSHIKI KAISHA;

    申请/专利号EP19930309538

  • 发明设计人 KAMIMURA SHINYA;

    申请日1993-11-30

  • 分类号H01L29/796;H01L27/148;

  • 国家 EP

  • 入库时间 2022-08-22 04:38:48

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