Manufacturing method of high temperature superconducting Josephson junction using Y2BaCuO5 substrate

摘要

The present invention relates to a method₂BaCuO₅The present invention relates to a method of manufacturing a high-temperature superconducting Josephson junction using a substrate, more specifically,₂BaCuO₅The present invention relates to a method for manufacturing Josephson conforming by depositing BaO and CuO thin films 2 and 3 on a substrate 1 in an equivalent ratio of 3: 5 and then patterning and heat-treating the resultant at a temperature of 850 to 1000C.;Since the microwave-type high-temperature superconducting Josephson junction according to the present invention does not directly etch the superconducting thin film, it is possible to avoid degradation of characteristics due to the chemical process in the process, and SrTiO₃, MgO, and the like are not used, which is very economical. In addition, it is possible to produce fine patterns, and various patterns can be produced, and the reproducibility of characteristics is excellent.