A method of integrating semiconductor components having polymer optical waveguide components and an electro-optical device comprising an integrated structure formed by the method

摘要

The present invention relates to a method of manufacturing an electro-optical device composed of integrating semiconductor components with polymer optical waveguide components and to an electro-optical device composed of an integrated structure made by the method, wherein the epitaxial lift-off (ELO) Wherein the semiconductor component obtained by the method of the present invention is embedded in an optical waveguide device composed of an appropriate cavity in addition to the polymer optical waveguide structure so as to integrate the semiconductor component having the polymer optical waveguide component, The polymer optical waveguide component and the semiconductor component are integrated on a substrate made of ash that is different from the material of the semiconductor component which is a material having excellent heat dissipation such as silicon and the polymer optical waveguide is made of a polymer in which the optical waveguide channel is provided by bleaching .