Gas friction vacuum pump with high vacuum section and pre-vacuum section - has cooling system for high vacuum section and pump is equipped with heater at its pre-vacuum section

摘要

The pump is equipped with one or more heat conducting resistances (37). The pump is provided on its high vacuum (HV) side with air cooling or liquid cooling (41). A regulating unit (43) is provided, which regulates the cooling and/or the heating dependent on signals, which are transmitted by one or more temp. sensors (44). The pump is designed as a turbo-molecular pump with a housing (1) and a stator (4), which has several distance rings (10). The pump is driven across a shaft (13) of a turbine runner (6) by means of a drive motor (16) designed as a slotted tube motor. USE/ADVANTAGE - Chemical processes. Pump cooled in manner so that solid matter build up problem is substantially eliminated.