Electromechanical valveless microminiature pump - has membrane actuator for applying oscillation perpendicular to fluid flow and anisotropic structure e.g. mfd by etching of silicon wafer.

摘要

A wall (2) is provided opposite to an actuator (AK) for determining a gap-type throughflow channel. The actuator (AK) has a membrane (M) and the direction of the oscillation movement (A) of the actuator is perpendicular to that of the fluid flow (B). An anisotropic structure (AS) is formed in the wall (2) opposite to the actuator (AK), in the actuator itself or in its membrane. It may also be formed in the throughflow channel (3) between the actuator and the walling (2). The width of the gap-type area is between one and one hundred micrometres. USE/ADVANTAGE - Micro-pump can be produced by photolithography using semiconductor material.