High power emitter esp. UV excimer laser with coated internal electrode - in transparent dielectric tube and external electrode grid, which has long life and can be made easily and economically

摘要

High power emitter, esp. for UV light, has a discharge chamber (7) filled with a gas emitting radiation during discharge. The outside wall consists (partly) of a dielectric tube (1), which is transparent to this radiation, with an external electrode grid (2) and internal electrode(s) (3), with a protective coating, running along the length of the tube. The electrodes are connected to an a.c. source (8). The tube is sealed at one or pref. both ends (6) by pinching. USE/ADVANTAGE - The emitter is useful as a UV excimer laser. The emitter has a longer life than usual and can be made easily and economically. Only easily coated components are exposed to the discharge and little coating is needed, since e.g. no UV-transparent protective coating is required. No costly internal quartz tube is used. Any electrodes, including those with complex geometries, e.g. spirals, can be used.