Metal-sealed bellows for feeding coolant to UHV electron beam evaporator source - has several bellows members coupled to rotary drive and rolling with it in rotary drive axis

摘要

The rotary liq. feed system feeds liq. media to a rotary device in an ultra high vacuum environment. The rotary device is coupled to a drive with a rotation axis. To the drive are coupled two bellows rolling up and out with it in the rotation axis. Within one bellows is a liq. inlet system, extending to the rotary device. A liq. outlet system is located within one bellows extending away from the rotary device. The bellows has exclusively metal seals. Pref. the bellows are treated in a housing system, and flexible seals may be used both for the liq. and for the ultra high vacuum. USE/ADVANTAGE - For several melting crucibles contg. evaporation source, with reliable sealing, without material contamination.