Preparation of tertiarybutyldimethylantimony and use thereof

摘要

The new compound tertiarybutyldimethylantimony is prepared by reacting an timony trihalide SbX.sub.3 with the tertiarybutyl Grignard reagent ((CH.sub.3).sub.3 C)MgX, treating the resulting product with the methyl Grignard reagent (CH.sub.3)MgX. where X is a halide, and recovering tertiarybutyldimethylantimony from the reaction mixture. The reaction is preferably carried out by a one pot synthesis in a suitable solvent such as diethyl either using approximately one equivalent of ((CH. sub.3).sub.3 C)MgX in relation to the SbX.sub.3 at about -50° C., followed by treatment with approximately two equivalents of (CH.sub.3)MgX in relation to the SbX.sub.3 at about 0° C. The tertiarybutyldimethylantimony is used as a precursor in forming antimony- containing semiconductor material by chemical vapor deposition.