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Positive image formation utilizing o-quinonediazide composition including selected phenolic derivatives of 4-(4-hydroxyphenyl)- cyclohexanone

机译:利用邻醌二叠氮化物组合物的正型图像形成,所述邻醌二叠氮化物组合物包括选定的4-(4-羟苯基)-环己酮的酚衍生物

摘要

A radiation-sensitive composition comprising an admixture in a solvent of: at least one alkali-soluble binder resin, at least one photoactive compound and an effective sensitivity enhancing amount of at least one compound of formula (I): ##STR1## wherein each R is individually selected from the group consisting of hydrogen and a lower alkyl group having 1-4 carbon atoms and each n is 0, 1, or 2; the amount of said binder resin being about 60 to 95% by weight, the amount of said photoactive component being about 5% to about 40% by weight, based on the total solids content of said radiation-sensitive composition.
机译:辐射敏感性组合物,其包含在溶剂中的混合物,所述混合物为:至少一种碱溶性粘合剂树脂,至少一种光敏化合物和有效提高感光度的至少一种式(I)化合物:每个R独立地选自氢和具有1-4个碳原子的低级烷基,并且每个n为0、1或2。基于所述辐射敏感性组合物的总固体含量,所述粘合剂树脂的量为约60至95重量%,所述光活性组分的量为约5重量%至约40重量%。

著录项

  • 公开/公告号US5346808A

    专利类型

  • 公开/公告日1994-09-13

    原文格式PDF

  • 申请/专利权人 OCG MICROELECTRONIC MATERIALS INC.;

    申请/专利号US19930148235

  • 发明设计人 ALFRED T. JEFFRIES III;

    申请日1993-11-08

  • 分类号G03F7/32;

  • 国家 US

  • 入库时间 2022-08-22 04:31:12

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