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Assembly for simultaneous observation and laser interferometric measurements, in particular on thin-film structures
Assembly for simultaneous observation and laser interferometric measurements, in particular on thin-film structures
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机译:用于同时观察和激光干涉测量的组件,特别是在薄膜结构上
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摘要
Assembly for observation and laser interferometric measurements of articles contained in an enclosure includes a video camera and a laser emitter unit. The laser emitter unit has two laser diodes whose beams follow the optical path of the video camera. An illumination system also follows the optical path of the video camera. The entire assembly is incorporated into a single box. The assembly is utilized for the observation and measurement of thin-film structures, in particular integrated-circuit boards.
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