The plane surface grinding device null which uses the grinding tape

摘要

PURPOSE:To offset the inertia forces of two blocks and to hardly generate vibration on the part of a polishing head by providing a synchronous driving mechanism performing the reciprocating linear movement of the press-fitting roller fitting block and damping block having equal masses in the reverse direction within a small range with their synchronization. CONSTITUTION:When a disk 5 is rotated at high speed by a driving motor 24, a lever is subjected to reciprocating circular moving in a high cycle by a crank rod 7, a press-fitting roller fitting block B1 and damping block B2 are synchronized and the reciprocating linear movement in the reverse direction is performed within a small range. Due to the masses of both blocks B1, B2 being equal, the sizes of the inertia forces of both blocks B1, B2 are equal at all times while under moving and yet the direction becomes in a reverse relation, in the case of performing the reciprocating linear movement of high cycle in a small range of both blocks B1, B2. Consequently, the inertia forces generated by the reciprocating linear movement of both blocks B1, B2 are offset and vibration is hardly generated on the part of a polishing head H.