METHOD AND APPARATUS FOR MEASURING OBJECT THREE-DIMENSIONALLY BY LIGHT SECTION METHOD

摘要

PURPOSE: To decrease the number of cameras required in light section method while enhancing the accuracy in measurement by shifting a pair of slit light and a camera integrally in the longitudinal direction of an object in order to obtain the cross-sectional data at a predetermined pitch and then measuring the object three-dimensionally based on the cross-sectional data. ;CONSTITUTION: Three sets of image pickup unit comprising slit lights 8a,...,8c and cameras 9a,...,9c are fixed to a gate frame which is then shifted in the longitudinal direction of an object. The object 2 is irradiated with each slit light 8a,...,8c perpendicularly and the cameras 9a,...,9c for picking up the reflected lights are disposed while inclining the optical axes by 45° against the slit. Since the slit lights 8 intersect the object 2 on one plane, the reflected lights enter straight into the camera 9 and thereby the cross-sectional data can be taken in sequentially as the gate frame moves. The cross-sectional data is processed by respective image processors and synthesized by a CPU 13 before being displayed.;COPYRIGHT: (C)1995,JPO