Measuring method and device null of displacing inside the straightness aspect by the

摘要

PURPOSE:To measure the degree of straightness and the displacement within a plane highly precisely by using a laser light as a straight-line reference. CONSTITUTION:A laser light is divided into two parallel laser lights 208 and 209 being symmetric in dimensions with the direction of a directional change. The axis of symmetry of these two laser lights being used as a straight-line reference, adjustment is made by an optical system 203 so that the optical paths of the two laser lights be equal. The lights are made to enter two position detectors 205 and 206 fixed to a substance 204 to be measured and signals from these position detectors are computed.