Non earthed electrode null for continual plasma treatment of long shaku

摘要

PURPOSE:To prevent generation of an unnecessary electric discharge in an non-grounded electrode and thereby perform an efficient plasma processing by forming said electrode with a metal surface and an interior designed elaborately so that the generation of a plasma is not allowed. CONSTITUTION:The surface is formed with a metal and the interior is constituted of an elaborately filled material 5 so that a plasma does not generate internally. A porous material which does not allow an internal generation of plasma should contain holes or voids of 10mm or less in diameter. In addition, the material of a filler 5 used to fill the interior of an electrode may be one which does not evaporate or decompose easily when a plasma processing is performed. For instance, the same metal as or a different type of metal from an electrode plate, various types of glass, ceramics, polymer compounds, resins, rubbers or other organic and inorganic materials can be used. If this electrode is employed, an unnecessary electric discharge in an isolated neutral electrode is prevented, and the electric discharge efficiency between the non-grounded electrode and an earthing electrode increases to make the processing highly efficient.