Absorption nozzle, ultrasonic dust exclusion nozzle and ultrasonic dust arrester

摘要

PURPOSE: To prevent the contamination of an ambient environment by the foreign matter peeled from a product surface by improving the air balance of a suction nozzle and an ultrasonic dust removing nozzle. ;CONSTITUTION: The reflection angle of a suction slit 26 is made to correspond to the incident angle of discharging slits 23, 24. The suction slit 26 is so formed that its slit width is gradually widened at a specific ratio in proportion to the tip and to increase an opening area little by little to maintain the specified suction air quantity in each part. The suction nozzle part 20 is internally provided with an air balance correction plate 25 and is thereby bisected to a first suction path 27 where the suction slit 26 opens and a second path 28 where the suction slit 26 does not open. An adequate suction pressure is applied on the front end as well by the second suction path 28, by which the correction of the air balance by the suction slit 26 is further intensified.;COPYRIGHT: (C)1994,JPO&Japio