Mirror surface grinding liquid and mirror surface grinding manner null of InP

摘要

PURPOSE:To form a mirror surface, which has small waviness and the abnormality of the surface of which is reduced, by using a mirror polishing liquid selected from a group consisting of the mixed liquid of sodium hypochlorite, sodium carbonate and water. CONSTITUTION:A mirror polishing liquid is selected from groups composed of the mixed liquid of sodium hypochlorite and sodium carbonate and water, the mixed liquid of sodium hypochlorite and sodium carbonate and sodium chloride and water, the mixed liquid of phosphoric acid and bromine and water and the mixed liquid of phosphoric acid and hydrogen peroxide and water. Even when either of said mirror polishing liquids is used, a mirror surface, which has the small waviness of the surface and the abnormality of the surface of which such as haze, bits, etc., is reduced, is shaped. The surface-plate diameter of a polishing machine: 300-600mmphi, surface-plate revolution: 20-60rpm, working pressure: 50-130g/cm2, the polishing time: 30-120 min, a polishing- liquid flowing disk: 2l/hr, and the kinds of polishing cloth: expanded polyurethane group soft cloth are preferable as the conditions of polishing.