The ultrasonic vibrating method of detection in the power microscope between the atoms and the sample observation manner null in the power microscope between

摘要

PURPOSE: To provide ultrasonic oscillation detecting method and sample observing method for interatomic force microscope in which the viscoelastic properties and the like can be measured at a frequency higher than 1MHz by generating ultrasonic oscillation of 1MHz or above in a sample and detecting the ultrasonic oscillation using a common cantilever. ;CONSTITUTION: A sample 8 is subjected to ultrasonic oscillation at a frequency sufficiently higher than the resonance frequency of a cantilever 11. Since the force functioning between a probe 4 and the sample 8 exhibits a nonlinear dependency on the distance, a displacement depending on the amplitude of oscillation is induced in the cantilever 11. Ultrasonic wave is detected by measuring the displacement.;COPYRIGHT: (C)1994,JPO