LIQUID CHEMICAL CONCENTRATION CONTROLLING METHOD AND CHEMICALLY TREATING DEVICE PROVIDED WITH LIQUID CHEMICAL CONCENTRATION CONTROLLER

摘要

PURPOSE: To automatically keep the concn. of a liq. chemical in a treating vessel in a specified liq. chemical concn. range. ;CONSTITUTION: A liq. chemical concn. measuring sensor 11 is connected in parallel to a valve 7 connected to the outlet 2C of a treating tank 2, the concn. of the liq. chemical in the treating tank is measured in real time, the data on the obtained concn. are processed by a liq. chemical concn. data processor 12 the obtained control signal is supplied to a controller 6, and a valve control signal is obtained based on the control signal. A liq. chemical replenishing tank 5 is connected to the replenishing port 2B of the tank 2 through a solenoid valve 8, the valve 8 is controlled by the valve control signal, the chemical is replenished from the tank 5, and the concn. of the chemical is kept constant.;COPYRIGHT: (C)1995,JPO