METHOD AND DEVICE FOR CONVERGING RADIATION ENERGY BEAM AND BEAM CONVERGING TARGET

摘要

PURPOSE: To recognize the state of a finishing point more quickly, by scanning a laser beam wafer repeatedly along the first scanning path, detecting the part of the laser beam reflected from the wafer, and analyzing the reflected beam for determining the desirable parking spot. ;CONSTITUTION: A beam spot 18 is moved in a stepping pattern by N times per one scanning along a scanning path 30. The intensity value of the reflected beam is stored into a digital base as the data value. These data values are stored as the vectors related to each scanning. These vectors are mathematically processed, and the desirable parking position for the laser beam spot 18 can be determined.;COPYRIGHT: (C)1995,JPO