PRODUCTION OF COATED BAR-SHAPED MEMBER, METHOD FOR PREVENTING LOCALIZATION OF PLASMA, AND SUPPORTING STAND FOR PRODUCING COATED BAR-SHAPED MEMBER

摘要

PURPOSE: To prevent the occurrence of local overheating and etching in a bar- shaped base material by plasma and to easily produce, with superior productivity, a coated bar-shaped member where the surface of the damage-free bar- shaped base material is uniformly coated with a coating material. ;CONSTITUTION: Plural bar-shaped base materials 1 are stood upright at spaces on a supporting stand 15, and also plural conductive bar-shaped members 4 are stood upright at spaces in the positions outside the above-mentioned bar- shaped base materials 1. Then, respective surfaces of the above bar-shaped base materials 1 are coated with coating material by means of microwave plasma CVD.;COPYRIGHT: (C)1995,JPO