ION DETECTING METHOD, MASS SPECTROMETRY, ION DETECTING DEVICE AND MASS SPECTROGRAPH

摘要

PURPOSE: To improve sensitivity of detecting a negative ion. ;CONSTITUTION: A mass-spectro-analyzed negative ion beam 22, after passing through a slit, is applied to irradiate a plate 24, applying plus high voltage, to emit a neutral atom 27, and the negative ion beam, after passing through a mesh electrode 30, is advanced into a secondary electron multiplier as an ion beam 35 ionized by an electron current 33, advanced into an amplifier 37 as a current after amplification, and further amplified. In this way, improving 10 times or more sensitivity is realized from a difference between abundance of sputtering yield of the neutral atom and secondary ion.;COPYRIGHT: (C)1995,JPO