Pressurized atmosphere furnace and method for controlling a pressurized atmosphere furnace

摘要

PURPOSE:To prevent excess temperature rise of a gas discharge tube by detecting the surface temperature of the tube when pressurized gas is discharged from a pressure vessel, stopping and restarting discharge of gas based on the detected surface temperature, and controlling a temperature in a furnace. CONSTITUTION:A controller 32 closes a gas discharge valve 10 to forcibly stop discharge of gas when the surface temperature of a gas discharge tube 9 detected by temperature detecting means 31 exceeds a set value T0 if a furnace is cooled therein, i.e., if a heater 5 is OFF. When the temperature is lowered by DELTAT from the set value T0, the forcible stop is released to restart the gas discharge. When the detected temperature value of the tube 9 exceeds the value T0 if the furnace is heated therein, i.e., if the heater 5 is ON, the gas discharge is forcibly stopped and the heater 5 is simultaneously turned OFF to stop heating. When the detected temperature value is lowered by DELTAT from the set value T0, the gas discharge and heating are restarted. Thus, the excess temperature rise of the tube can be prevented.