TEMPERATURE-SENSITIVE MAGNETIC THIN FILM, ITS MANUFACTURE, AND PHOTODETECTING TYPE THIN FILM TEMPERATURE SENSOR

摘要

PURPOSE: To provide techniques related to a temperature-sensitive magnetic thin film to which a designated temperature can be set easily with high accuracy and which can be formed through a simple process, the manufacturing method of the thin film, and a temperature sensor which utilizes the thin film and can accurately detect the temperature of a very small area by light from a remote area. ;CONSTITUTION: A temperature-sensitive magnetic thin film composed of a thin film 2 of an Fe-Rh alloy which has the crystal structure of cesium chloride and contains an element selected from among Pd, Pt, Ir, Ru, and Os by ≤5atm% and a nonmagnetic thin film 3 which is formed on the thin film 2 and a partially varying thickness, a temperature-sensitive thin film manufacturing method by which the nonmagnetic thin film 3 is unevenly formed on the alloy thin film 2, and a photodetecting type thin film temperature sensor using the temperature-sensitive magnetic thin film. Therefore, the temperature-sensitive thin film which can be arbitrarily controlled to a designated temperature with accuracy can be easily manufactured and a manufacturing method by which the temperature-sensitive thin film can be manufactured through a simple process so that the sensitive temperature of the thin film can be easily corrected is provided. In addition, a thin film temperature sensor which can detect the temperature of a very small area by light from a remote place can be obtained.;COPYRIGHT: (C)1995,JPO