MONITORING AND JUDGING METHOD FOR SURFACE ROUGHNESS IN NONCONTACT TYPE MEASUREMENT

摘要

PURPOSE: To obtain a surface roughness judgement method which can be substituted for the tracer method, by carrying out the distribution evaluation by setting the intensity of the reflected light as Y-axis and the surface finishing intensity as X-axis by the scattered light system using the wave packet light signal, monitoring the transition point developed by the regular reflected light and the scattered light, and comparing the result with the surface finishing degree to be obtained. ;CONSTITUTION: The oscillation signal supplied from a signal generator 10 consisting of an oscillator which is constituted of an electric circuit is phase- shaped and sent to a modulation circuit 11. Further, the electric signal which is phase-shaped is inputted to a CPU 13 through an A/D converter 12. The light-modulated signal (wave packet wave) is applied on the surface of a workpiece (sample), and the reflected light is received (light-detected) by a photodiode, and the received light signal is decoded to the electric signal by a decoding circuit 14. The decoded signal is phase-synchronized, and at the same time, the signal is sent to the CPU 13 through an A/D converter 15, and of the surface finishing situation is made possible to be seen a screen as electric signal.;COPYRIGHT: (C)1995,JPO