FOREIGN MATTER DETECTION METHOD AND FOREIGN MATTER DETECTOR FOR SUBSTRATE OF LIQUID CRYSTAL

摘要

PURPOSE: To improve detectability of foreign matter by bringing a pair of substrates for liquid crystals into uniform and tight contact with each other by using a differential pressure, thereby generating Newton rings by the foreign matter. ;CONSTITUTION: This foreign matter detection method and foreign matter detector have a pair of partition wall members 12₁, 12₂ which are formed to a planar form having apertures and are arranged in parallel with each other so as to hold the substrates for liquid crystals therebetween, substrate supporting members 13 which are interposed between the respective partition wall members of a pair of the partition wall members and the substrates for liquid crystals, are formed to an annular shape having elasticity so as to include the apertures on the inner side and support the substrates for liquid crystals so as to divide the substrates to the inner side region facing the apertures and the outer edge region exclusive of the inner side region and a uniform pressing means 19 which reduces the pressure between the respective substrates via the partition wall members facing the outer edge region so as to generate the Newton rings by the foreign matter in the inner side region and uniformly presses the inner side region of the substrates for liquid crystals by the atm. pressure.;COPYRIGHT: (C)1995,JPO