PHOTON TUNNEL SCANNING IMAGE BREAKING-DOWN METHOD AND INSTRUMENT

摘要

PURPOSE: To break down and find a topography image of a sample surface and a refractive index distribution image of a sample by using a mathematical method by forming a photon tunnel scanning image by irradiating the sample by a light flux of plural orthogonal azimuths of an instrument. ;CONSTITUTION: Output of a laser 7 is inputted to optical fibers 25 whose input is fixed to a positioning slide 29 through a lens 20 and a neutral sensitizer 26. Outputs of the respective fibers 25 are fixed to four azimuths of 0, π, π/2 and 3π/2 and an azimuth of a large number of incident angles. In the four directions of such an instrument, a photon tunnel image [ΔH°(x, y), ΔH^π(x, y), ΔH^π/2 (x, y) and ΔH^3π/2(x, y)] is formed, and an expression is derived, and a solution of simultaneous equations is found, and a topography image ΔZo(x, y) of a sample surface and a surface refractive index change distribution image Δn₁(x, y) are calculated. In the expression, Δθy(x, y) is a 0 azimuth and a sample surface inclination of a Y-Z plane of Z axis, and Δθ^x(x, y) is a sample surface inclination of an X-Z plane, and (i=1 to n, and j=1 to m) are realized.;COPYRIGHT: (C)1995,JPO