PURPOSE:To execute the marking at high precision after positioning by avoiding the deterioration of the positioning precision due to the spatial factors without adjustment. CONSTITUTION:The coordinate values of each lattice point in the normal coordinate system are read by using a pattern recognizing device where the lattice pattern is marked after the center position (origin) on the lattice is aligned to the center of an area to be worked, and the marked pattern is passed through a cross line monitor mounted for adjustment. The error of X is approximated by the polynominal of X by the method of approximation of functions for each Y on the lattice. When the error of X in an arbitrary coordinate (x, y) is obtained, the error at X=x is obtained for each Y from the polynominal of X, and the approximate formula is obtained in the form of the polynominal of Y by the method of approximation of functions from these data, and the correction at Y=y is obtained to calculate the correction at an arbitrary coordinate (x, y). Positional correction is executed by giving the difference in the error at each point as the correction to a galvanometer driver, which is added to the relative movement between the present position and the destination position.
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