APPARATUS FOR ADJUSTING POSITION OF LEFT/RIGHT PROBES CORRESPONDING TO THICKNESS OF SUBSTRATE OF IN-CIRCUIT TESTER OF XY SYSTEM

摘要

PURPOSE: To improve a durability and an accuracy of probes. ;CONSTITUTION: A plurality of sets of X-Y units each having a Z-axis unit movable in the direction of Y axis set on an arm movable in the direction of X axis are provided in the apparatus. A plunger for receiving a spring force projects from a supporting tube at each Z-axis unit of a probe of the apparatus. The probe is driven in the direction of Z-axis by a pulse motor. One arm is arranged at the left side and another arm is at the right side of the apparatus. An adjusting device 72 for adjusting positions of left and right probes set in the apparatus has a calculating means 68 for calculating X-Y coordinates as a moving reference for each of left and right probes corresponding to a thickness of a to-be-inspected substrate, and a determining means 70 for determining the number of steps of each pulse motor for driving the left and right probes.;COPYRIGHT: (C)1995,JPO