METHOD AND APPARATUS FOR IMAGING DISLOCATIONS IN MATERIALS USING A SCANNING ELECTRON MICROSCOPE

摘要

apparatus for producing images of dislocations in materials using a scanning electron microscope, in which a sensor electronics is located very close to the specimen being examined.without the intervention of a filter ru00e9tardateur field; low loss electrons are collected by the detector receives electrons from the specimen to an obtuse angled relative to the electron beam incident; and a system for improving the quality of the imag es is used.