首页> 外国专利> Fully automated and computerized conveyor based manufacturing line architectures adapted to pressurized sealable transportable containers

Fully automated and computerized conveyor based manufacturing line architectures adapted to pressurized sealable transportable containers

机译:全自动和计算机化的基于传送带的生产线架构,适用于加压可密封运输的容器

摘要

Fully automated and computerized manufacturing conveyor based line architecture (15) for the storage, handling and transporting of articles in view of the treatment thereof in a plurality of processing equipments (500) ; said manufacturing line being installed in an average cleanliness ambient including:a) pressurized sealable transportable containers (100) of the type consisting of a box-shaped housing provided with an access opening sealed with releasable door means and gas injection valve means enclosing a workpiece therein;b) conveyor transportation means (401-1);c) gas supply installation means (700-1) comprising a compressed ultra pure neutral gas supply source and a delivery system.d) dispatching apparatus means with a gas distribution system (300-1) comprising:storage/gas feeding means (302) for storing the containers basically consisting of a frame supporting a number of support stations or bins each provided with gas injector means connected to said gas supply installation means;handling means (301) for transferring said containers between said bins and said conveyor transportation means;e) interface apparatus means (201-1) adapted to receive said containers and transfer the workpiece enclosed therein to a processing equipment (500-1) comprising:container receiving means for receiving/sending a container from/to said conveyor transportation means;a pressurized port zone or loadlock provided with transfer robot means therein, interfacing said container receiving means with said processing equipment;actuator means for moving said container on said container receiving means; and,f) computer means (600) for overall control of said conveyor transportation means, dispatching apparatus means, gas supply installation means, interface apparatus means and said processing equipments.
机译:基于物品的在多个处理设备(500)中的处理,基于全自动和计算机化的基于制造传送带的生产线架构(15),用于物品的存储,处理和运输;所述生产线安装在平均清洁度环境中,包括:a)加压可密封的可运输容器(100),其类型为盒形外壳,外壳上装有一个通气孔,该通气孔用可释放的门装置和将工件密封在其中的注气阀装置密封; b)输送机运输装置(401-1); c)包括压缩超纯中性气体供应源和输送系统的气体供应安装装置(700-1)。d)具有气体分配系统(300-1)的调度装置,包括:用于存储容器的存储/气体供给装置(302)基本上由支撑多个支撑站或容器的框架组成,每个支撑站或容器具有与所述气体供应安装装置连接的气体喷射器装置;用于在所述容器之间转移所述容器的处理装置(301)。箱和所述输送机运输装置; e)接口装置装置(201-1),其适于接收所述容器并将容纳在其中的工件转移到处理设备(500-1),所述处理设备包括:容器接收装置,用于从/从所述输送机运输装置接收/发送容器;加压端口区域或装载闸,在其中设有转移机器人装置,使所述容器接收装置与所述处理设备对接;致动器装置,用于在所述容器接收装置上移动所述容器手段; f)计算机装置(600),用于对所述输送机运输装置,调度装置,供气安装装置,接口装置和所述处理设备进行总体控制。

著录项

  • 公开/公告号EP0582019B1

    专利类型

  • 公开/公告日1995-10-18

    原文格式PDF

  • 申请/专利权人 IBM;

    申请/专利号EP19920480112

  • 发明设计人 LAFOND ANDRÉ;GARRIC GEORGES;

    申请日1992-08-04

  • 分类号H01L21/00;

  • 国家 EP

  • 入库时间 2022-08-22 04:13:29

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