Fine-processing apparatus using low-energy neutral particle beam

摘要

A fine-processing apparatus using a low-energy neutral particle beam is disclosed. The apparatus comprises a plasma chamber for generating a high-density plasma therein, an electrode for drawing out a low-energy ion beam from the plasma chamber, a neutralizing chamber in which a reactive gas is introduced so as to contact the ion beam to neutralize the ion beam through charge exchange and produce a neutral particle beam, and regulating means for aligning the direction of motion of the neutral particle beam produced in the neutralizing chamber toward an object to be processed. The fine processing is effected by assist of bombardment with the low-energy neutral particle beam simultaneously with a reaction of the reactive gas adsorbed on the surface of the object to be processed.