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DOPING CONTROL METHOD FOR PREPARING HIGH QUALITY N TYPE-GAAS SINGLE CRYSTAL BY HORIZONTAL BRIDGMAN

机译:水平布里奇曼制备高质量N型Gas单晶的掺杂控制方法

摘要

The dopping method for controlling a high temperature melt-fusion at the high quality n-type GaAs growth by the horizontal bridgman method is characterized by (a) locating a high concentrate silicon (Si)-dopped polycrystal into the rear of the quartz boat, (b) heating and melting the rear of the polycrystal, and (c) melting the rear of the GaAs molten material to its seed, in order. The method effectively controls a high temperature melt-fusing reaction between the quartz boat and the molten material at the GaAs bulk growth.
机译:通过水平布里奇曼方法以高质量n型GaAs生长控制高温熔体熔合的掺杂方法,其特征在于(a)将掺杂高浓度硅(Si)的多晶置于石英舟的后部, (b)加热并熔化多晶的后部,以及(c)依次将GaAs熔融材料的后部熔化成其晶种。该方法有效地控制了在GaAs整体生长时石英舟和熔融材料之间的高温熔融-熔融反应。

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