Adhesion method of PELLICLE for fluorine resin for MID-ULTRAVIOLET and DEEP-ULTRAVIOLET

摘要

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a vibration damping film used to increase yield YIELD by preventing foreign matter adherence or contamination that may be generated in a reticle or a mask during a PHOTOLITHOGRAPHY process in a semiconductor manufacturing process , And more particularly to a method for bonding to a fluororesin dustproof film which is suitably used for irradiating heavy and deep ultraviolet light (MID &DEEP UV);When the nitrogen gun having a diameter of 1 mm of the present invention was attached to the vibration damper frame and the membrane at 45 and the nitrogen pressure was adjusted at a distance of 2.54 cm (1 inch) from the film, the adhesive strength .