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PROCESS OF MANUFACTURE OF MULTIBEAM ELECTRON-OPTICAL SYSTEM
PROCESS OF MANUFACTURE OF MULTIBEAM ELECTRON-OPTICAL SYSTEM
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机译:多光束电子光学系统的制造过程
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摘要
FIELD: electronics. SUBSTANCE: slots are made with electroerosion method when making holes in modulator and controlling electrodes. Axes of slots match centers of holes. EFFECT: facilitated manufacture of electron-optical system. 6 dwg
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