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Thin pyroelectric IR detector composed of sintered metal oxides
Thin pyroelectric IR detector composed of sintered metal oxides
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机译:由烧结金属氧化物组成的薄型热释电红外探测器
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摘要
An improved infrared detector element and an improved method for manufactng same is provided. A commercially available rough art wafer of ferroelectric material is ion milled under conditions which provide an extremely thin element with a near flawless detection surface.
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