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Silicon-on-insulator CMOS device and a liquid crystal display with controlled base insulator thickness

机译:绝缘体上硅CMOS器件和具有受控基础绝缘体厚度的液晶显示器

摘要

A semiconductor device has an NMOS transistor and a PMOS transistor formed on at least one monocrystal Si region formed in a thin- film Si layer formed on an insulation layer. The thickness T.sub.BOX of the insulation layer on which the NMOS and PMOS transistors are formed, the voltage V.sub.SS of a low-voltage power supply and the voltage V.sub. DD of a high-voltage power supply for the NMOS and PMOS transistors satisfy a relationship expressed by the following equation:P PT. sub.BOX (V.sub.DD -V.sub.SS -K.sub.2)/K.sub.1P P where K.sub.1 .tbd.&egr;.sub.BOX (Q.sub.BN +Q.sub.BP), K.sub.2 .tbd. 2. PHI..sub.FN +2&PHgr;.sub.FP -1.03, &egr;.sub.BOX.sup.-1 is the dielectric constant of the base insulation layer, Q.sub.BN and Q.sub.BP are bulk charges when the widths of depletion layers of the NMOS and PMOS transistors are maximized, and &PHgr;.sub.FN and &PHgr;.sub.FP are pseudo Fermi potentials of the NMOS and PMOS transistors.
机译:半导体器件具有NMOS晶体管和PMOS晶体管,该NMOS晶体管和PMOS晶体管形成在形成在绝缘层上的薄膜Si层中形成的至少一个单晶Si区域上。在其上形成NMOS和PMOS晶体管的绝缘层的厚度T BOX,低压电源的电压V SS以及电压V s。用于NMOS和PMOS晶体管的高压电源的DD满足由以下等式表达的关系:

T。 sub.BOX>(V.sub.DD -V.sub.s -K.sub.2)/K.sub.1

其中,K.sub.1.tbd.egg.sub.BOX (Q.sub.BN + Q.sub.BP),K.sub.2 tbd。 2. PHI FN + 2&PHgr -FP3 -1.03,&egr; BOX sup.-1是基础绝缘层QBN和QBP的介电常数当NMOS和PMOS晶体管的耗尽层的宽度最大时,B是大电荷,而&PHgr; FN和&PHgr; FP是NMOS和PMOS晶体管的伪费米电势。

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