OPTICAL SCANNER, OPTICAL SENSOR DEVICE AND CODE INFORMATION READER AS WELL AS CODE INFORMATION READING METHOD

摘要

PURPOSE: To provide a small-sized optical scanner which is strong to disturbance vibration of a motor, etc., and is capable of two-dimensionally scanning. ;CONSTITUTION: One end of a bending elastic deformation part 3a having a bending deformation mode is supported in cantilever by a vibration input part 4 and the other end thereof is provided with a connecting part 5. A vibrator 1 which supports a scan part 6 to the part 5 and the part 4 by means of two pieces of torsional elastic deforming parts 3b having a torsional deformation mode is formed integrally from a silicon wafer, etc. The vibration surface of a driving source 2 is joined to the part 4. The part 6 is provided with a mirror part 7 for reflecting a light beam (r). Only the bending stress and shearing stress are respectively applied on the part 3a and the parts 3b. These parts are thus made strong to fatigue fracture and impact fracture. The high-speed scanning is made possible with a small size by reducing the thickness T of the elastic deforming parts and shortening the length L.;COPYRIGHT: (C)1996,JPO