VAPOR GROWTH APPARATUS AND METHOD FOR REMOVING REACTION TUBE FROM VAPOR GROWTH APPARATUS

摘要

PURPOSE: To make it possible to prevent white phosphorus from igniting when a reaction tube deposited with white phosphorus is removed by using a simple procedure. ;CONSTITUTION: Cooling means such as a cooling coil 10 which cools a gas flowing in a route to a temperature below 0°C is provided in a route for introducing the gas into a reaction tube 1. Or a low-temperature gas introduction route for introducing a low-temperature inactive gas under the temperature of 0°C is provided in the reaction tube. Before the reaction tube 1 is removed when a vapor growth apparatus is diassembled, the inside of the reaction tube 1 is cooled to a temperature below 0°C, then the reaction tube 1 is removed.;COPYRIGHT: (C)1996,JPO