MEASUREMENT OF RADIATION LUMINANCE THROUGH ANGULAR FILTERING BEING EMPLOYED IN TEMPERATURE MEASUREMENT OF HEAT RADIATING OBJECT

摘要

PROBLEM TO BE SOLVED: To measure the radiation luminance of an object placed in a chamber by providing a detector for detecting radiation energy propagating from a surface element of the object along an optical path, and an angular filtering means disposed on the optical path in order to suppress propagation of the radiation energy into the detector. ;SOLUTION: An equipment 10 measures the reflectance and radiation luminance of a semiconductor water 12 placed in a quartz chamber 14 of an RTP heater 16 simultaneously. The reflectance is measured by a reflectance measuring apparatus 18 and the radiation luminance is measured by a radiation luminance measuring apparatus 20. Output signals from the apparatus, i.e., an incident output on a line 22 and a reflection output on a line 24, are fed to an emissivity calculator 26 in a signal processor 28 where the emissivity of a water 12 is calculated. Angular filtering is carried out through operation of a lens 84 and a diaphragm 78 for suppressing passage of a beam inclining against a baffle assembly 70 in order to measure the radiation luminance at a single point on the wafer 12 thus removing the background radiation. Emissivity from the apparatus 26 and radiation luminance from the apparatus 20 are fed to a temperature calculator 30 where the temperature is calculated.;COPYRIGHT: (C)1996,JPO