PRODUCTION OF POROUS ELECTRICALLY CONDUCTIVE SILICON CARBIDE SINTERED BODY

摘要

PURPOSE: To ensure superior oxidation resistance by molding a powdery mixture of specified SiC powder with Si₃N₄ powder and a carbonaceous material and firing the resultant molded body in a nonoxidizing atmosphere not contg. N₂. ;CONSTITUTION: The particle size distribution of SiC powder having 1-50μm average particle diameter is regulated so that the ratio (D₁₀/D₅₀) of the particle diameter of 10% cumulative particle size of the distribution to that of 50% cumulative particle size is made ≥0.2 and the SiC powder is mixed with a powdery mixture prepd. by mixing Si₃N₄ with a carbonaceous material such as carbon black so that the molar ratio of metallic Si forming the Si₃N₄ to carbon is made 1.0-2.0. Proper amts. of water and an org. binder such as PVA are added to the resultant powdery mixture contg. 20-70wt.% SiC and they are kneaded and molded in a prescribed shape. The resultant molded body is dried, dewaxed by heating and fired at 1,600-2,300°C in a nonoxidizing atmosphere not contg. gaseous N₂ to obtain the objective porous electrically conductive SiC sintered body having about 1-40μm pore diameter and about ≥40% porosity.;COPYRIGHT: (C)1996,JPO