DISCHARGE PREVENTIVE METHOD IN ENERGY PARTICLE GENERATOR, THIS DISCHARGE PREVENTIVE STRUCTURE AND ENERGY PARTICLE GENERATOR

摘要

PURPOSE: To reduce abnormal discharge, and obtain an constantly stable electron beam by removing moisture or the like adsorbed to an anode by heating the anode when a cathod is replaced in the atmosphere. ;CONSTITUTION: A cathode installing member 24 and an anode installing member 26 are made openable and closable by a hinge 28, and an electron gun 5 is constituted. When a cathode 23 and a filament 22 are replaced, the electron gun 5 is put in an opening condition. In this condition, the inside of the electron gun is exposed to the atmosphere, and an impure substance such as moisture in the atmosphere is adsorbed to an anode 25. Therefore, the anode 25 is heated by using a hot air heater 44, and the impure substance such as moisture adsorbed to the anode 25 is discharged.;COPYRIGHT: (C)1996,JPO