RANGE MEASURING APPARATUS OF ION BEAM, RANGE MEASURING METHOD OF ION BEAM USING THE APPARATUS AND CONTROL METHOD OF IMPLANTATION DEPTH IN ION IRRADIATION USING THE APPARATUS

摘要

PURPOSE: To perform the high-accuracy range measurement of an ion beam quickly and simply. ;CONSTITUTION: A range measuring apparatus is constituted so as to be provided with a collimator 3 which limits the angle of incidence of an ion beam, with a thin plate 4 whose quality is identical to that of an irradiation material, with a pedestal 5 which is arranged at the rear part of the thin plate 4, with ampere meters 2a, 2b which measure a current flowing in the thin plate 4 and the pedestal 5, with a cylindrical case 7 which supports the collimator 3, the thin plate 4 and the pedestal 5 and with a permanent magnet 6 which gives a magnetic field at a prescribed magnitude in a direction perpendicular to the irradiation direction of the ion beam near the cylindrical case 7.;COPYRIGHT: (C)1996,JPO