HARD COATING FILM EXCELLENT IN WEAR RESISTANCE AND HARD COATING FILM COATED MEMBER

摘要

PURPOSE: To impart superior wear resistance by forming a hard coating film of a compd. of Al, Ti and Si as metallic elements and C and N as nonmetallic elements having a specified compsn. on the surface of a substrate and coating the surface of the hard coating film with boron nitride. ;CONSTITUTION: A hard coating film consisting of two layers is formed on the surface of a substrate. The 1st layer is formed on the substrate side and has a chemical compsn. represented by the formula (Al_xTi_1-x-ySi_y) (C_zN_1-z) (where 0.05≤x≤0.75, 0.01≤y≤0.1 and 0≤z≤0.4). Boron nitride is laminated as the 2nd layer on the surface of the 1st layer. The thicknesses of hard coating films as the 1st and 2nd layers are preferably regulated to 0.1-20μm each. Since the BN coating film having high hardness, excellent in oxidation resistance and having a low coefft. of friction has superior affinity for and reactivity with the (Al, Ti, Si) (C, N) coating film and does not deteriorate the adhesion of the (Al, Ti, Si) (C, N) coating film to the substrate, hardness and oxidation resistance as the entire hard coating film are enhanced and wear resistance is improved.;COPYRIGHT: (C)1996,JPO