ANALYZING METHOD FOR IMPURITY IN ORGANIC METAL COMPOUND AND DECOMPOSING DEVICE FOR IMPURITY ANALYSIS

摘要

PURPOSE: To provide a method for accurately analyzing organic compounds as impurities by subjecting an organic metal compound as an object to be inspected to a hydrolysis and provide a decomposing device for analysis of impurtities. ;CONSTITUTION: An object to be inspected 35 consists of an organic metal compound which contains organic compounds as impurities is put in a vessel 30, to which an inert gas is fed, and the object 35 is led together with the inert gas to a hydrolyzing chamber which is in connection with the vessel 30. The organic compounds gasified in this chamber 40 and segregated from the object 35 is adsorbed together with the inert gas to a column in a gas collecting pipe 18 and desorbed by a heating introducing device 64, and the concentration of the organic compounds is determined by a gas chromatography 6-5.;COPYRIGHT: (C)1996,JPO