PRODUCTION OF DIELECTRIC MULTILAYERED REFLECTION MIRROR

摘要

PURPOSE: To provide a production method of a dielectric multilayered film reflection mirror for long wavelengths without limited by the dielectric material or without roughening the surface of the film. CONSTITUTION: The dielectric multilayered film reflection mirror is produced by alternately depositing high refractive index dielectric films 2 and low refractive index dielectric films 3. In this method, the one dielectric film, namely, either the high refractive index dielectric film 2 or the low refractive index filmy 3, is made thinner than the thickness causing roughening the film surface. The other dielectric film, namely, either the low refractive index dielectric film 3 or the high refractive index dielectric film 2 is made thicker to compensate the decreased thickness of the other dielectric film.