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Production method null of perikuru

机译:罗祖·乔恩·梅约·努鲁·佩里库鲁

摘要

PURPOSE:To increase the adhesive power between a thin transparent film and antireflection layer by supplying a polymer soln. prepd. by dissolving specific fluorine-contained polyacrylate onto a thin cellulose deriv. film and forming the antireflection layer by a spin film forming method. CONSTITUTION:The polymer soln. prepd. by dissolving the fluorine-contained (meth)acrylate which contains the monomer selected from formula I and has =50wt.% fluorine content in the polymer into the solvent which can dissolve said fluorine-contained (meth)acrylate and does not dissolve or swell the substrate-shaped cellulose deriv. and has the b.p. in a 40-220 deg.C range is supplied into the dried thin cellulose derive. film and the antireflection layer consisting of the fluorine polymer is formed by the spin film forming method. In formula, R1 denotes H or methyl group; R2 denotes a fluoroalkyl group which may con tain an ether-oxygen atom in-between. The inter-layer adhesive power between the cellulose derive. layer and the fluorine-contained poly(meth)acrylate polymer layer is thereby increased and the two layers are pulled and stripped without separating the film.
机译:目的:通过提供聚合物溶液来增加透明薄膜与减反射层之间的粘合力。准备通过将特定的含氟聚丙烯酸酯溶解在薄纤维素衍生物上。然后通过旋转膜形成方法形成抗反射层。组成:聚合物溶液。准备通过将包含选自式I的单体并且在聚合物中具有≥50wt。%的氟含量的含氟(甲基)丙烯酸酯溶解到能够溶解所述含氟(甲基)丙烯酸酯并且不溶解或溶胀的溶剂中底物状纤维素衍生物。并具有b.p.在40-220℃范围内,将其供应到干燥的薄纤维素衍生物中。膜和由氟聚合物组成的抗反射层通过旋转膜形成方法形成。式中,R 1表示H或甲基。 R 2表示可在其间包含醚-氧原子的氟代烷基。纤维素之间产生层间粘合力。从而增加层和含氟的聚(甲基)丙烯酸酯聚合物层,并且在不分离膜的情况下牵拉和剥离两层。

著录项

  • 公开/公告号JP2551087B2

    专利类型

  • 公开/公告日1996-11-06

    原文格式PDF

  • 申请/专利权人 MITSUI PETROCHEMICAL IND;

    申请/专利号JP19880047091

  • 发明设计人 MATSUZAKI HITOMI;AGO TOKINORI;

    申请日1988-02-29

  • 分类号G03F1/14;C09D133/16;H01L21/027;

  • 国家 JP

  • 入库时间 2022-08-22 03:58:12

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