re - reference Mira for the interferometer - installation device

摘要

PURPOSE:To enable the shortening of position detecting time by mounting a vibrationproof member between mirrors and a stage having the mirrors set thereon to check vibrations of the mirrors. CONSTITUTION:Mirrors 1 are arranged on mirror supports 11 provided at a plurality of parts on sides on an X stage 3 and pressed securely with mirror fixing metals 6 provided to counter the supports. Here, at least one of mirror supports 11 provided on the sides of the stage is built in a parallel plate spring structure and a plate spring vibrationproof member 8 such as vibrationproof rubber is placed between plate springs. With such an arrangement, vibrations of the plate springs can be damped quickly to check vibrations of the mirrors 1 on the plate springs. To check the vibrations more effectively, a mirror vibration proofing member 14 is inserted into a position other than the supports 11.